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Legacy Tools, New Tricks: Optical 3D Inspection

White light interferometry and other optical approaches can help detect defects in advanced packages. Stacking chips is making it far more difficult to find existing and latent defects, and to check for things like for things like die shift, leftover particles from other processes, co-planarity of bumps, and adhesion of different materials such as dielectrics.

[ via Semiconductor Engineering ]
White light interferometry and other optical approaches can help detect defects in advanced packages. Stacking chips is making it far more difficult to find existing and latent defects, and to check for things like for things like die shift, leftover particles from other processes, co-planarity of bumps, and adhesion of different materials such as dielectrics.

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